Selected Publications

• All-Silicon Multispot 2-D Beam Steering MEMS Mirror
  IEEE SENSORS JOURNAL, 2026

• pyMOE: Mask design and modeling for micro optical elements and flat optics ☆
  COMPUTER PHYSICS COMMUNICATIONS, 2024

• Assessing tolerances in direct write laser grayscale lithography and reactive ion etching pattern transfer for fabrication of 2.5D Si master molds
  MICRO AND NANO ENGINEERING, 2023

• Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography
  MICRO AND NANO ENGINEERING, 2022

• Surface Texture Detection With a New Sub-mm Resolution Flexible Tactile Capacitive Sensor Array for Multimodal Artificial Finger
  JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2020