Diogo Aguiam
Staff Researcher
Diogo Aguiam has a BSc and MSc in Electronics Engineering from Instituto Superior Técnico, Lisbon, having received Best in Class and Best Graduate awards, and obtained a double PhD with distinction in Physics Engineering from University of Ghent, Belgium, and University of Lisbon, Portugal, in 2018 in the field of Nuclear Fusion and Plasma Engineering. Between 2013 and 2018 he worked at IPFN, in Lisbon, Portugal, and the Max-Planck-Institute for Plasma Physics, in Garching, Germany, developing microwave reflectometry diagnostics for nuclear fusion. He became a Staff Researcher at the International Iberian Nanotechnology Laboratory, Braga, Portugal, in 2018 where he has led several applied research projects in the fields of integrated optics, MEMS, and optical MEMS towards the fields of automotive, aerospace and environmental monitoring.
Selected Publications
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Nanoimprint lithography for grayscale pattern replication of MEMS mirrors in a 200 mm wafer
JOURNAL OF MANUFACTURING PROCESSES, 2024 -
Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography
MICRO AND NANO ENGINEERING, 2022 -
Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2020 -
Surface Texture Detection With a New Sub-mm Resolution Flexible Tactile Capacitive Sensor Array for Multimodal Artificial Finger
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2020