
Micro and Nanofabrication
The Micro and Nanofabrication (MNF) Facility operates a Class 100 cleanroom with a total area of 1,200 m2. It offers access to a state-of-the-art equipment suite for micro- and nanofabrication solutions on 200 mm diameter wafers with applications ranging from electronics, medical devices, microfluidics, energy and sensors.
Besides training and supporting users, the MNF facility at INL is a key partner for contracted research and services from the early stage of the design concept up to the last phase of the first prototype. It unfolds from device design, process integration and development to expert process engineering on the latest core technologies.
The MNF facility is also prepared for small pre-production series, including multi-project wafers (MPW), facilitating technology transfer to industry for research laboratories, start-ups, SMEs and large companies.
Core fabrication areas
Multi-target Singulus sputtering tool for magnetic multilayers (Timaris MTM)
Multi-target confocal sputtering tool (Kenosistec)
Metallization Singulus sputtering tool for Al, TiW(N) and Al2O3 (Timaris FTM)
EasyTube 3000 Graphene CVD furnace system
SPTS MPX CVD system for oxides, oxi:nitrides and a-Si:H deposition
PECVD (800ºC) systems for CNT and carbon layers deposition tool (MicroSys 400 from Roth & Rau Microsystems)
Thin film silicon CVD system (hotwire and radio-frequency assisted, doped and intrinsic Si layers)
Cu Electroplating (AMMT GmbH)
Atomic Layer Deposition (Beneq TFS 200)
Broad Beam ion milling with SIMS end point detect (Nordiko 7500)
Fluorine-based reactive ion etch system for oxides / nitrides (SPTS APS)
Chlorine-based reactive ion etch systems for metals (SPTS ICP and SPTS C2L ICP)
Silicon Deep reactive ion etching system (SPTS Pegasus)
Plasma asher (PVA TEPLA M360)
TMAH / KOH Si etch tanks (AMMT GmbH)
Multiple fume hoods and wet benches for chemical processes (Quimipol)
Oxide vapour etch release system (SPTS/PRIMAXX uEtch)
XeF2 isotropic Si etch system (Xactic X4)
Supercritical CO2 point dryer (Tousimis)
E-beam lithography tool (Vistec 5200 ES 100 kV)
Nanoimprint Lithography (Obducat Eitre8)
Direct write laser lithography (Heidelberg DWL 2000)
Mask aligner (Karl Suss MA BA model)
Optical resist track (Karl Suss Gamma Cluster)
E-beam resist track (Karl Suss Gamma Cluster)
Multiple ovens, including vapour priming
Coater and hotplates for substrates up to 300 mm (SCS/EMS)
Chemical Mechanical Planarization (Logitech ORBIS)
Dicing saw (Disco DAD 3500)
Wire Bonder / Aluminium Wedge, Pick and Place (TPT HB)
Wire Bonder / Gold ball bond (TPT HB)
Pick and place (Finetech Fineplacer Sigma)
Advanced desktop research printer (LP50 Roth & Rau B.V.)
Magnetic Annealer (TEL, MATR 2000)
High-resolution SEM (NanoSEM, FEI)
Contact profilometer (KLA TENCOR P-16+)
Resistivity mapper (AITCO)
Optical profilometer/ellipsometer (OPM hyperion with confocal sensor / Ocean Optics NanoCalc XR)
Multiple automated wafer probers for electrical testing and others
Manual and motorized optical microscopes for Automatic Optical Inspection
Projects
Publications
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Expanding the applications of the wear-resistant titanium aluminum nitride thin-film to include temperature sensing
JOURNAL OF SCIENCE-ADVANCED MATERIALS AND DEVICES, 2024Elucidating the degradation mechanisms of Pt-free anode anion-exchange membrane fuel cells after durability testing
JOURNAL OF MATERIALS CHEMISTRY A, 2024Flexible Pressure and Temperature Microsensors for Textile-Integrated Wearables
ACTUATORS, 2024Novel Method for the Preparation of Lamellas From Porous and Brittle Materials for In Situ TEM Heating/Biasing
MICROSCOPY AND MICROANALYSIS, 2024The Comprehensive Roadmap Toward Malaria Elimination Using Graphene and its Promising 2D Analogs
ADVANCED NANOBIOMED RESEARCH, 2024Electrodeposition of Bi2Se3 on conductive substrates: Influence of electrolyte temperature on morphology, crystalline structure, and optical properties
Applied Surface Science, 2024Controlling Fluorescence Wavelength in the Synthesis of TGA-Capped CdTe Quantum Dots
CHEMOSENSORS, 2024Fabrication and sensing properties of a molecularly imprinted polymer on photonic PDMS substrate for the optical detection of C-reactive protein
Chemical Engineering Journal, Volume 485, 2024, 149924. , 2024 -
Enhanced alpha-amylase inhibition activity of amine-terminated PAMAM dendrimer stabilized pure copper-doped magnesium oxide nanoparticles
BIOMATERIALS ADVANCES, 2023The role of interfaces and morphology on silver diffusion in hard coatings
SURFACES AND INTERFACES, 2023A Voltage-Tuned Terahertz Absorber Based on MoS2/Graphene Nanoribbon Structure
NANOMATERIALS, 2023Illumination Power, Stability, and Linearity Measurements for Confocal and Widefield Microscopes V.2
https://www.protocols.io/, 2023Microfabrication of double proof-mass SOI-based matryoshka-like structures for 3-axis MEMS accelerometers
MICRO AND NANO ENGINEERING, 2023Stable Graphene Membranes for Selective Ion Transport and Emerging Contaminants Removal in Water
ADVANCED FUNCTIONAL MATERIALS, 2023Bipolar Resistive Switching in 2D MoSe2 Grown by Atmospheric Pressure Chemical Vapor Deposition
ACS APPLIED MATERIALS & INTERFACES, 2023Material jetting of carbon nano onions for printed electronics
NANOTECHNOLOGY, 2023Van der Waals Heteroepitaxy of GaSe and InSe, Quantum Wells, and Superlattices
ADVANCED FUNCTIONAL MATERIALS, 2023Community-developed checklists for publishing images and image analyses
NATURE METHODS, 2023Assessing tolerances in direct write laser grayscale lithography and reactive ion etching pattern transfer for fabrication of 2.5D Si master molds
MICRO AND NANO ENGINEERING, 2023 -
A post-synthetic modification strategy for the synthesis of pyrene-fused azaacene covalent organic frameworks
MICROPOROUS AND MESOPOROUS MATERIALS, 2022Monitoring the point spread function for quality control of confocal microscopes
https://www.protocols.io/, 2022Threefold reactivity of a COF-embedded rhenium catalyst: reductive etherification, oxidative esterification or transfer hydrogenation
CHEMICAL COMMUNICATIONS, 2022A comparative study of the effect of different surface treatments on polymeric substrates
VACUUM, 2022Room-temperature emitters in wafer-scale few-layer hBN by atmospheric pressure CVD
FLATCHEM, 2022Structural Properties of Nanometer-Sized Gold Nanoparticles on a Silicon Substrate
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2022Photocurrent Enhancement with Arrays of Silicon Light Nanotowers for Photovoltaic Applications
ACS APPLIED NANO MATERIALS, 2022Dealloyed Octahedral PtCu Nanoparticles as High-Efficiency Electrocatalysts for the Oxygen Reduction Reaction
ACS APPLIED NANO MATERIALS, 2022Design and fabrication of bimetallic plasmonic colloids through cold nanowelding
NANOSCALE, 2022Green Solvents for the Liquid Phase Exfoliation Production of Graphene: The Promising Case of Cyrene
FRONTIERS IN CHEMISTRY, 2022Lab-on-a-chip technologies for minimally invasive molecular sensing of diabetic retinopathy
LAB ON A CHIP, 2022Strain-modulated optical response in 2D MoSe2 made by Na-assisted CVD on glass
APPLIED PHYSICS LETTERS, 2022Strain-modulated optical response in 2D MoSe2 made by Na-assisted CVD on glass
APPLIED PHYSICS LETTERS, 2022Surface Passivation of III-V GaAs Nanopillars by Low-Frequency Plasma Deposition of Silicon Nitride for Active Nanophotonic Devices
ACS APPLIED ELECTRONIC MATERIALS, 2022Synergistic Combination of Charge Carriers and Energy-Transfer Processes in Plasmonic Photocatalysis
ACS APPLIED MATERIALS & INTERFACES, 2022Illumination Power and illumination stability
https://www.protocols.io/, 2022Piezoelectric aluminum nitride thin-films: A review of wet and dry etching techniques
MICROELECTRONIC ENGINEERING, 2022Synthetic strategy for metallophthalocyanine covalent organic frameworks for electrochemical water oxidation
MATERIALS TODAY CHEMISTRY, 2022Fabrication and optical characterization of large aperture diffractive lenses using greyscale lithography
MICRO AND NANO ENGINEERING, 2022 -
Effect of Se-Free Annealing on Cesium Fluoride-Treated Cu(In,Ga)Se2 Thin Films and Corresponding Solar Cells
PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 2021Analysis of Natural Killer Cells by THz Time-domain Spectroscopy
Nanolito2021, 2021Efficient ReSe2 Photodetectors with CVD Single-Crystal Graphene Contacts
NANOMATERIALS, 2021Efficient ReSe2 Photodetectors with CVD Single-Crystal Graphene Contacts
NANOMATERIALS, 2021Vertically-aligned carbon nanotube at low pressure by cold-wall thermal CVD using a two-phase deposition step
CARBON TRENDS, 2021High-Performance and Industrially Viable Nanostructured SiOx Layers for Interface Passivation in Thin Film Solar Cells
SOLAR RRL, 2021Hydrogenated Graphene Improves Neuronal Network Maturation and Excitatory Transmission
ADVANCED BIOLOGY, 2021Interactions Between 2D Materials and Living Matter: A Review on Graphene and Hexagonal Boron Nitride Coatings
FRONTIERS IN BIOENGINEERING AND BIOTECHNOLOGY, 2021Broadband and Omnidirectional Antireflection Surfaces Based on Deep Subwavelength Features for Harvesting of the Solar Energy
SOLAR RRL, 2021Hybrid Multisite Silicon Neural Probe with Integrated Flexible Connector for Interchangeable Packaging
SENSORS, 2021 -
Efficient light extraction in subwavelength GaAs/AlGaAs nanopillars for nanoscale light-emitting devices
OPTICS EXPRESS, 2020Fabrication of a MEMS Micromirror Based on Bulk Silicon Micromachining Combined With Grayscale Lithography
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2020Surface Texture Detection With a New Sub-mm Resolution Flexible Tactile Capacitive Sensor Array for Multimodal Artificial Finger
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2020Graphene-based biosensor for Viral Detection
arXiv preprint arXiv:2006.11881, 2020An efficient and deterministic photon management using deep subwavelength features
NANO ENERGY, 2020Design and Characterization of 3D Self-folded Micro Antennas for Implantable Microdevices
IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION, 2020Opportunities for enhanced omnidirectional broadband absorption of the solar radiation using deep subwavelength structures
NANO ENERGY, 2020Clean-Room Lithographical Processes for the Fabrication of Graphene Biosensors
MATERIALS, 2020Field-effect transistors made of graphene grown on recycled copper foils
MATERIALS CHEMISTRY AND PHYSICS, 2020Graphene in the fight against malaria
arXiv preprint arXiv:2008.13605, 2020 -
Conformal and continuous deposition of bifunctional cobalt phosphide layers on p-silicon nanowire arrays for improved solar hydrogen evolution
NANO RESEARCH, 2018Frequency modulated magnetometer using a double-ended tuning fork resonator
Proc. 31th Eur. Conf. Solid-State Transducers (Eurosensors XXXII), Graz, Austria, Sept. 9-12, 2018, 1028 (4 pp), 2018High frequency FM MEMS accelerometer Using piezoresistive resonators
Proc. 31th Eur. Conf. Solid-State Transducers (Eurosensors XXXII), Graz, Austria, Sept. 9-12, 2018, 1048 (4 pp), 2018Insulator Materials for Interface Passivation of Cu(In,Ga)Se-2 Thin Films
IEEE JOURNAL OF PHOTOVOLTAICS, 2018On the identification of Sb2Se3 using Raman scattering
MRS COMMUNICATIONS, 2018Resonant accelerometer based on double-ended tuning fork and a force amplification mechanism
Proc. 31th Eur. Conf. Solid-State Transducers (Eurosensors XXXII), Graz, Austria, Sept. 9-12, 2018, 1030 (4 pp), 2018SU-8 based waveguide for optrodes
Proc. 31th Eur. Conf. Solid-State Transducers (Eurosensors XXXII), Graz, Austria, Sept. 9-12, 2018, 814 (4 pp), 2018Creative Approaches on Interactive Visualization and Characterization at the Nanoscale
Interactivity, Game Creation, Design, Learning, and Innovation, 2018High-Resolution Seismocardiogram Acquisition and Analysis System
SENSORS, 2018Chromonic self-assemblies in a series of dialkyl-thiacarbocyanine dyes and generalization of a facile route for the synthesis of fluorescent nanostructured silica fibers
JOURNAL OF THE TAIWAN INSTITUTE OF CHEMICAL ENGINEERS, 2018Digital platform for Sigma-Delta accelerometer assessment and test
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2018Highly-ordered silicon nanowire arrays for photoelectrochemical hydrogen evolution: an investigation on the effect of wire diameter, length and inter-wire spacing
SUSTAINABLE ENERGY & FUELS, 2018Rear Contact Passivation for High Bandgap Cu(In,Ga)Se-2 Solar Cells With a Flat Ga profile
IEEE JOURNAL OF PHOTOVOLTAICS, 2018Al-Induced In Situ Formation of Highly Active Nanostructured Water-Oxidation Electrocatalyst Based on Ni-Phosphide
ACS CATALYSIS, 20183D Magnetic field reconstruction methodology based on a scanning magnetoresistive probe
Sensors, vol. 18, no. 7, 2049 (15pp), Jun. 2018, 2018Four-Variable Model of an Enzymatic Oscillator Based on Trypsin
ISRAEL JOURNAL OF CHEMISTRY, 2018Cover Feature: Adsorption of Pharmaceutical Pollutants from Water Using Covalent Organic Frameworks (Chem. Eur. J. 42/2018)
Chemistry: A European Journal, 2018Adsorption of Pharmaceutical Pollutants from Water Using Covalent Organic Frameworks
CHEMISTRY-A EUROPEAN JOURNAL, 2018Arrays of suspended silicon nanowires defined by ion beam implantation: mechanical coupling and combination with CMOS technology
NANOTECHNOLOGY, 2018Combining CXCR4-targeted and nontargeted nanoparticles for effective unassisted in vitro magnetic hyperthermia
BIOINTERPHASES, 2018Fluctuating potentials in GaAs:Si nanowires: critical reduction of the influence of polytypism on the electronic structure
NANOSCALE, 2018Growth of Sb2Se3 thin films by selenization of RF sputtered binary precursors
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2018Highly efficient DNA extraction and purification from olive oil on a washable and reusable miniaturized device
ANALYTICA CHIMICA ACTA, 2018Hollow cobalt phosphide octahedral pre-catalysts with exceptionally high intrinsic catalytic activity for electro-oxidation of water and methanol
JOURNAL OF MATERIALS CHEMISTRY A, 2018Locally-confined electrodeposition of Cu(In,Ga)Se-2 micro islands for micro-concentrator solar cells
2018 IEEE 7TH WORLD CONFERENCE ON PHOTOVOLTAIC ENERGY CONVERSION (WCPEC) (A JOINT CONFERENCE OF 45TH IEEE PVSC, 28TH PVSEC & 34TH EU PVSEC), 2018Locally-confined electrodeposition of Cu(In,Ga)Se2 micro islands for micro-concentrator solar cells
2018 IEEE 7th World Conference on Photovoltaic Energy Conversion (WCPEC) (A Joint Conference of 45th IEEE PVSC, 28th PVSEC & 34th EU PVSEC), 2018MULTI-FREQUENCY SILICON NANOFRACTAL RESONATOR
2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2018Open-Source Potentiostat for Wireless Electrochemical Detection with Smartphones
ANALYTICAL CHEMISTRY, 2018Optimized Magnetodielectric Coupling on High-Temperature Polymer-Based Nanocomposites
JOURNAL OF PHYSICAL CHEMISTRY C, 2018Orthogonal Clickable Iron Oxide Nanoparticle Platform for Targeting, Imaging, and On-Demand Release
CHEMISTRY-A EUROPEAN JOURNAL, 2018Passivation of Interfaces in Thin Film Solar Cells: Understanding the Effects of a Nanostructured Rear Point Contact Layer
ADVANCED MATERIALS INTERFACES, 2018Probing of Thermal Transport in 50 nm Thick PbTe Nanocrystal Films by Time-Domain Thermoreflectance
JOURNAL OF PHYSICAL CHEMISTRY C, 2018Slow-muon study of quaternary solar-cell materials: Single layers and p-n junctions
PHYSICAL REVIEW MATERIALS, 2018Structure-Activity Relationships for Pt-Free Metal Phosphide Hydrogen Evolution Electrocatalysts
CHEMISTRY-A EUROPEAN JOURNAL, 2018Study of buckling behavior at the nanoscale through capillary adhesion force
APPLIED PHYSICS LETTERS, 2018A new paradigm in thin-film silicon MEMS
Impact, Feb. 2018 (invited), 2018Electrospun fibers for drug and molecular delivery
Electrofluidodynamic Technologies (EFDTs) for Biomaterials and Medical Devices - Woodhead Publishing Series in Biomaterials, 2018Optical Lithography Patterning of SiO2 Layers for Interface Passivation of Thin Film Solar Cells
SOLAR RRL, 2018Passivation of Interfaces in Thin Film Solar Cells: A morphological and electronic study of ultrathin rear passivated Cu(In,Ga)Se2 solar cells
Thin Solid Films, vol. 671, pp. 77-82, Dec. 2018, 2018 -
Adsorption of marine phycotoxin okadaic acid on a covalent organic framework
JOURNAL OF CHROMATOGRAPHY A, 2017Fine-tuning the manipulation of micro-to-nano biomedical flows by thin film microelectromagnet traps
MICROMACHINES, 2017On-Chip Magnetic Nanoparticle Manipulation and Trapping for Biomedical Applications
IEEE TRANSACTIONS ON MAGNETICS, 2017Cd and Cu Interdiffusion in Cu(In, Ga) Se-2/CdS Hetero-Interfaces
IEEE JOURNAL OF PHOTOVOLTAICS, 2017Fabrication of biodegradable microneedle patches for drug delivery
6th China-Europe Symposium on Biomaterials in Regenerative Medicine (CESB 2017), Porto, Portugal, May 21-24, 2017, pp. 186-187, 2017Application of SU-8 photoresist as a multi-functional structural dielectric layer in FOWLP
13th International Conference and Exhibition on Device Packaging (International Microelectronics Assembly and Packaging Society – IMAPS), Fountain Hills (AZ), USA, Mar. 6-9, 2017, vol. 2017, no. DPC, pp. 1-19, 2017Influence of CdS and ZnSnO Buffer Layers on the Photoluminescence of Cu(In,Ga)Se-2 Thin Films
IEEE JOURNAL OF PHOTOVOLTAICS, 2017Microneedles with integrated magnetoresistive sensors: a precision tool in biomedical instrumentation
2017 IEEE SENSORS APPLICATIONS SYMPOSIUM (SAS), 2017Challenges and trends in magnetic sensor integration with microfluidics for biomedical applications
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2017NOVEL MAGNETIC READOUT FOR HYBRID SPINTRONIC MEMS DEVICES
2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2017Ultra-Low Temperature FOWLP Process for the Embedding of Low Thermal Budget Sensors and Components using SU-8 as dielectric
2017 IEEE 67TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC 2017), 2017CdS and Zn1-xSnxOy buffer layers for CIGS solar cells
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2017Combination of Microfluidic Loop-Mediated Isothermal Amplification with Gold Nanoparticles for Rapid Detection of Salmonella spp. in Food Samples
FRONTIERS IN MICROBIOLOGY, 2017Combination of Microfluidic Loop-Mediated Isothermal Amplification with Gold Nanoparticles for Rapid Detection of Salmonella spp. in Food Samples
FRONTIERS IN MICROBIOLOGY, 2017Emerging nanostructured electrode materials for water electrolysis and rechargeable beyond Li-ion batteries
ADVANCES IN PHYSICS-X, 2017Epitaxial CuInSe2 thin films grown by molecular beam epitaxy and migration enhanced epitaxy
JOURNAL OF CRYSTAL GROWTH, 2017Magnetite Nanoparticles for Stem Cell Labeling with High Efficiency and Long-Term in Vivo Tracking
BIOCONJUGATE CHEMISTRY, 2017Materials efficient deposition and heat management of CuInSe2 micro-concentrator solar cells
SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2017Rear contact passivation for high bandgap Cu(In,Ga)Se-2 solar cells with varying absorber thickness and flat Ga profile
2017 IEEE 44TH PHOTOVOLTAIC SPECIALIST CONFERENCE (PVSC), 2017Towards High-Resolution Scanning Magnetoresistance Microscopy
2017 IEEE 12TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS), 2017Ultra-Small Packaged Micro-Cooler for Medical Applications
2017 IEEE 19TH ELECTRONICS PACKAGING TECHNOLOGY CONFERENCE (EPTC), 2017Interface Engineering in Nanostructured Nickel Phosphide Catalyst for Efficient and Stable Water Oxidation
ACS CATALYSIS, 2017Flexible Magnetoresistive Sensors Designed for Conformal Integration
IEEE TRANSACTIONS ON MAGNETICS, 2017 -
Integration of Magnetoresistive Sensors With Atomic Force Microscopy Cantilevers for Scanning Magnetoresistance Microscopy Applications
2015 IEEE MAGNETICS CONFERENCE (INTERMAG), 2015